We performed analysis of square pillars, which were made with photolithography technique from SU-8 photoresist for potential future use in microfluidic systems. Thickness of this specific sample was 100 µm. We use this kind of photoresist for different types of applications such as microelectronics industry, microfluidics, microelectromechanical systems parts, for lab on chip and bioelectronics.
After the analysis we used FIB technique for a micro bowling session to demonstrate the capability and precision of our integrated micromanipulator system. In a video below is a demonstration of an interesting way how we can use micromanipulator, but we can use it also for: eg. TEM lamella preparation, nano device manufacturing, and semiconductor industry failure analysis.
The experiment was performed with a collaboration of Midalix company (https://midalix.com/).